Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Liquid tamped targets for extreme ultraviolet lithography

Liquid tamped targets for extreme ultraviolet lithography

US Patent 11086226 · Granted Aug 10, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multi-directional short-wave methods and systems2024