Frequency adjustment method of vibration element, manufacturing method of vibration element, vibration element, physical quantity sensor, inertial measurement device, electronic apparatus, vehicle

Assignee

• Seiko Epson

Inventors

• Shogo Sasaki (13 patents)
• Masashi Shimura (13 patents)
• Keiichi Yamaguchi (94 patents)
• Masahiro Oshio (26 patents)
• Ryuta Nishizawa (69 patents)
• Seiichiro Ogura (38 patents)

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