Magnetically actuated MEMS switch

Assignee

• Tdk

Inventors

• Akifumi Kamijima (90 patents)
• Atsushi Iijima (112 patents)
• Kyung-Ku Choi (21 patents)
• Katsunori Osanai (7 patents)
• Daisuke Iwanaga (16 patents)

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