Vertical thermal gradient compensation in a z-axis MEMS accelerometer

Assignee

• Invensense

Inventors

• David deKoninck (5 patents)
• Varun Subramaniam Kumar (6 patents)
• Matthew Julian Thompson (58 patents)
• Vadim Tsinker (25 patents)
• Logeeswaran Veerayah Jayaraman (8 patents)
• Sarah Nitzan (9 patents)
• Houri Johari-Galle (23 patents)
• Jongwoo Shin (56 patents)
• Le Jin (15 patents)

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