Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity

Electrostatic chuck with features for preventing electrical arcing and light-up and improving process uniformity

US Patent 11069553 · Granted Jul 20, 2021

Estimated economic value: $260,622,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Tunability of edge plasma density for tilt control2025
Fan-out package structure and fabrication method therefor2025
Radiofrequency signal filter arrangement for plasma processing system2025
Radiofrequency signal filter arrangement for plasma processing system2025
Radiofrequency signal filter arrangement for plasma processing system2025
Multi-plate electrostatic chucks with ceramic baseplates2025
Methods and systems for managing byproduct material accumulation during plasma-b2025
Methods and systems for managing byproduct material accumulation during plasma-b2025
Low frequency RF generator and associated electrostatic chuck2025
Low frequency RF generator and associated electrostatic chuck2025
Low frequency RF generator and associated electrostatic chuck2025
Low frequency RF generator and associated electrostatic chuck2025