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Home › Fabrication of integrated computational elements using cylindrical substrate support shaped to match a cross-section of a spatial profile of a deposition plume

Fabrication of integrated computational elements using cylindrical substrate support shaped to match a cross-section of a spatial profile of a deposition plume

US Patent 11066740 · Granted Jul 20, 2021

Estimated economic value: $15,916,000 ⓘ

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