{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Large area high resolution feature reduction lithography technique", "item": "https://www.patentleaderboard.com/patent/11042098"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025

Large area high resolution feature reduction lithography technique

US Patent 11042098 · Granted Jun 22, 2021

Estimated economic value: $66,836,000

Assignee

Inventors

View full patent text on Google Patents →