Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › In-situ integrated chambers

In-situ integrated chambers

US Patent 11037838 · Granted Jun 15, 2021

Estimated economic value: $88,912,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Doped polar layers and semiconductor device incorporating same2025
Methods of correlating zones of processing chambers, and related systems and met2025
Multizone lamp control and individual lamp control in a lamphead2025
Methods for detection using optical emission spectroscopy2025
Methods for detection using optical emission spectroscopy2025
Thermal processing susceptor2025
Thermal processing susceptor2025
Overlap susceptor and preheat ring2025
Doped polar layers and semiconductor device incorporating same2025
Methods for controlling contact resistance in cobalt-titanium structures2025
Method for forming silicon-phosphorous materials2025
Method for forming silicon-phosphorous materials2025