Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wafer handling equipment and method thereof

Wafer handling equipment and method thereof

US Patent 11031266 · Granted Jun 8, 2021

Estimated economic value: $12,095,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

PWM signal conversion circuit and method, and LED dimming system2025
In-situ apparatus for detecting abnormality in process tube2025
Chemical mechanical polishing apparatus and method2025
Apparatus and methods for determining fluid dynamics of liquid film on wafer sur2025
Method and system for semiconductor wafer defect review2025
Nozzle having real time inspection functions2025
System and method for high speed inspection of semiconductor substrates2024
Semiconductor processing tool and methods of operation2024
Method and system for diagnosing a semiconductor wafer2024
Machine learning on wafer defect review2024
Method and system for semiconductor wafer defect review2023
Semiconductor processing tool and methods of operation2023