Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Simulation-assisted alignment between metrology image and design

Simulation-assisted alignment between metrology image and design

US Patent 11029609 · Granted Jun 8, 2021

Estimated economic value: $44,613,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method in the manufacturing process of a device, a non-transitory computer-reada2025
Apparatus and method for process-window characterization2025
Simulation-assisted alignment between metrology image and design2023
Apparatus and method for process-window characterization2023
Measurement method and apparatus2022
Displacement based overlay or alignment2020
Apparatus and method for process-window characterization2020
Hotspot aware dose correction2019
Indirect determination of a processing parameter2019
Eye diagram construction display apparatus2015