Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › CSOI MEMS pressure sensing element with stress equalizers

CSOI MEMS pressure sensing element with stress equalizers

US Patent 11029227 · Granted Jun 8, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Mems pressure sensing element with stress adjustors to minimize thermal hysteres2023
Mems pressure sensing element with stress adjustors to minimize thermal hysteres2023
Stacked or unstacked MEMS pressure sensor with through-hole cap and plurality of2019
Oil separator for reducing residue deposits2019
Automotive electronic device having a cover with fins to reduce gel vibration2019
Cavity with silicon on insulator MEMS pressure sensing device with an extended s2019
Cavity with silicon on insulator MEMS pressure sensing device with an extended s2019
Pressure sensor device with a MEMS piezoresistive element attached to an in-circ2018
Stress-isolated absolute pressure sensor2018
Stress-isolated absolute pressure sensor2018
Pressure sensor device with anchors for die shrinkage and high sensitivity2018
Pressure sensor device with anchors for die shrinkage and high sensitivity2018