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Home › Micromechanical detection structure for a MEMS sensor device, in particular a MEMS gyroscope, with improved driving features

Micromechanical detection structure for a MEMS sensor device, in particular a MEMS gyroscope, with improved driving features

US Patent 11015933 · Granted May 25, 2021

Estimated economic value: $21,290,000 ⓘ

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