Method for making thin film transistor with nanowires as masks

Assignee

• Tsinghua University
• Foxconn

Inventors

• Mo Chen (100 patents)
• Qun Li (436 patents)
• Li Zhang (222 patents)
• Xiao-Yang Xiao (27 patents)
• Jin Zhang (28 patents)
• Shou-Shan Fan (1,312 patents)

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