Substrate supporting device

Assignee

• Ngk Spark Plug Co.

Inventors

• Noriaki Tokusho (4 patents)
• Shunichi Sasaki (5 patents)
• Tomohiro Ishino (10 patents)
• Hisanori Aoyama (1 patents)
• Makoto Hino (14 patents)
• Kenichi Fukazawa (1 patents)
• Atsushi Tsuchida (17 patents)
• Toshiya Umeki (3 patents)

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