Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Articles coated with fluoro-annealed films

Articles coated with fluoro-annealed films

US Patent 10961617 · Granted Mar 30, 2021

Estimated economic value: $143,132,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Post CMP cleaning composition2025
Electrostatic chuck with a charge dissipation structure2025
Electrostatic chuck prepared by additive manufacturing, and related methods and 2025
Substrate with fluorinated yttrium coatings, and methods of preparing and using 2025
Conductive polymeric layers for charge dissipation2024
Coatings for enhancement of properties and performance of substrate articles and2024
Coatings for enhancement of properties and performance of substrate articles and2024
Coatings for enhancement of properties and performance of substrate articles and2024
Coatings for enhancement of properties and performance of substrate articles and2024
Methods for applying a blanket polymer coating to a substrate2023
Substrate support features and method of application2023
Chemical resistant multi-layer coatings applied by atomic layer deposition2023