Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Rotary friction welded blank for PECVD heated showerhead

Rotary friction welded blank for PECVD heated showerhead

US Patent 10941489 · Granted Mar 9, 2021

Estimated economic value: $195,916,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Shower head2025
Reduced diameter carrier ring hardware for substrate processing systems2025
Liquid precursor vaporizer2025
Dual gas feed showerhead for deposition2022
Baffle plate and showerhead assemblies and corresponding manufacturing method2019
Rotary friction welded blank for PECVD heated showerhead2019
Rotary friction welded blank for PECVD heated showerhead2019
Ball screw showerhead module adjuster assembly for showerhead module of semicond2016