Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Pitch/roll annulus gyroscope with slanted quadrature tuning electrodes and related fabrication methods

Pitch/roll annulus gyroscope with slanted quadrature tuning electrodes and related fabrication methods

US Patent 10921123 · Granted Feb 16, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods having multi-axis sensitivity and translational mode shapes2025
Acoustically decoupled MEMS devices2025
Acoustically decoupled MEMS devices2023
Accelerometer contact microphones and methods thereof2023
Substrate-decoupled high-coriolis-coupling pitch/roll gyroscope2023
Substrate-decoupled high-coriolis-coupling pitch/roll gyroscope2023
Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope with slanted qu2023
Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope with slanted qu2023
Distributed-mode beam and frame resonators for high frequency timing circuits2022
Distributed-mode beam and frame resonators for high frequency timing circuits2022
MEMS inertial measurement apparatus having slanted electrodes for quadrature tun2022
MEMS inertial measurement apparatus having slanted electrodes for quadrature tun2022