Oxide semiconductor film and semiconductor device

Assignee

• Semiconductor Energy Laboratory

Inventors

• Shunpei Yamazaki (6,629 patents)
• Masashi TSUBUKU (247 patents)
• Kengo Akimoto (389 patents)
• Hiroki Ohara (149 patents)
• Tatsuya Honda (184 patents)
• Takatsugu Omata (27 patents)
• Yusuke Nonaka (169 patents)
• Masahiro Takahashi (378 patents)
• Akiharu Miyanaga (267 patents)

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