Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Siloxazane compound and composition comprising the same, and method for producing silceous film using the same

Siloxazane compound and composition comprising the same, and method for producing silceous film using the same

US Patent 10913852 · Granted Feb 9, 2021

Estimated economic value: $218,407,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Polymer, semiconductor composition comprising polymer, and method for manufactur2025
Polymer, semiconductor composition comprising polymer, and method for manufactur2025
Silicon-containing film forming composition and method for manufacturing silicon2025
Amorphous silicon forming composition comprising block copolymer and method for 2024
Method for producing amorphous silicon sacrifice film and amorphous silicon form2024
Polycarbosilazane, and composition comprising the same, and method for producing2024
Polycarbosilazane, and composition comprising the same, and method for producing2024
Silicon carbonaceous film forming composition comprising polycarbosilane and met2021
Film forming composition2021
Perhydropolysilazane, composition containing same, and method for forming silica2017
Perhydropolysilazane, composition containing same, and method for forming silica2017
Method for forming isolation structure2015