Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › High voltage vacuum feedthrough

High voltage vacuum feedthrough

US Patent 10886093 · Granted Jan 5, 2021

Estimated economic value: $39,807,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Clamp assembly2025
Method, apparatus, and system for wafer grounding2024
Stage apparatus suitable for a particle beam apparatus2024
High voltage vacuum feedthrough2022
Lithographic apparatus and method2021
Methods and apparatus for obtaining diagnostic information relating to a lithogr2020
Method and apparatus for obtaining diagnostic information relating to a lithogra2019
Apparatus for cleaning an object2018
Lithographic apparatus and method2018
Object holder, lithographic apparatus, device manufacturing method, and method o2017
Chuck, a chuck control system, a lithography apparatus and a method of using a c2016
Electrostatic clamp, lithographic apparatus and method2016