Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Calibration method for a lithographic apparatus

Calibration method for a lithographic apparatus

US Patent 10884345 · Granted Jan 5, 2021

Estimated economic value: $39,807,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Determining a correction to a process2025
Methods and apparatus for controlling a lithographic process2025
Method for controlling a semiconductor manufacturing process2025
Computational metrology2025
Method of wafer alignment using at resolution metrology on product features2024
Method for monitoring lithographic apparatus2024
Determining a correction to a process2024
Method of obtaining measurements, apparatus for performing a process step, and m2023
Method for determining corrections for lithographic apparatus2023
Method for controlling a manufacturing apparatus and associated apparatuses2023
Optimizing a sequence of processes for manufacturing of product units2022
Method of determining a set of metrology points on a substrate, associated appar2022