Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method

Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method

US Patent 10876218 · Granted Dec 29, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lithium complex oxide2025
Detection and mitigation of aggressive medium reservations2025
Speech synthesis apparatus and method thereof2025
Substrate supporting plate, thin film deposition apparatus including the same, a2025
Substrate supporting plate, thin film deposition apparatus including the same, a2025
Substrate supporting plate, thin film deposition apparatus including the same, a2025
Substrate supporting plate, thin film deposition apparatus including the same, a2025
Substrate supporting apparatus, substrate processing apparatus including the sam2025
Method of depositing silicon oxide films2025
Lithium composite oxide and lithium secondary battery comprising the same2025
Positive electrode active material and lithium secondary battery comprising the 2024
Lithium composite oxide and lithium secondary battery comprising the same2024