Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing

Moment cancelling pad raising mechanism in wafer positioning pedestal for semiconductor processing

US Patent 10870922 · Granted Dec 22, 2020

Estimated economic value: $165,593,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Auto-calibration to a station of a process module that spins a wafer2025
Process module chamber providing symmetric RF return path2025
Multiple-output radiofrequency matching module and associated methods2025
Impedance transformation in radio-frequency-assisted plasma generation2025
Impedance transformation in radio-frequency-assisted plasma generation2025
Common terminal heater for ceramic pedestals used in semiconductor for fabricati2025
In situ protective coating of chamber components for semiconductor processing2025
Lamellar ceramic structure2025
Anomalous plasma event detection and mitigation in semiconductor processing2025
Mechanical indexer for multi-station process module2025
Distortion of pulses for wafer biasing2025
Mechanical suppression of parasitic plasma in substrate processing chamber2025