Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Wafer boat cooldown device

Wafer boat cooldown device

US Patent 10858738 · Granted Dec 8, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Injector configured for arrangement within a reaction chamber of a substrate pro2025
Injector configured for arrangement within a reaction chamber of a substrate pro2025
Substrate processing apparatus, reactor mover for moving a reactor of the appara2025
Apparatus for processing a plurality of substrates provided with an extractor ch2025
Flange and apparatus for processing substrates2025
Substrate processing apparatus with an injector2025
Substrate processing apparatus with an injector2025
Substrate processing apparatus for processing substrates2024
Chemical vapor deposition furnace with a cleaning gas system to provide a cleani2024
Injector2024
Batch furnace assembly and method of operating a batch furnace assembly2024
Injector configured for arrangement within a reaction chamber of a substrate pro2024