Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of fabricating a semiconductor device with an overlay key pattern

Method of fabricating a semiconductor device with an overlay key pattern

US Patent 10825777 · Granted Nov 3, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of manufacturing integrated circuit device2025
Extreme ultraviolet lithography device and method of operating extreme ultraviol2024
Method of fabricating three-dimensional semiconductor memory device2023
Semiconductor device manufacturing system2023
Light source device and light emission control method2023
Semiconductor device2022
Method of fabricating phase shift mask and method of fabricating semiconductor d2020
Methods of revising overlay correction data2017
Semiconductor device2015
Chip size package having concave pattern in the bump pad area of redistribution 2003
Method for fabricating a semiconductor device2002
Method for manufacturing semiconductor devices having redistribution patterns wi2002