Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Edge ring dimensioned to extend lifetime of elastomer seal in a plasma processing chamber

Edge ring dimensioned to extend lifetime of elastomer seal in a plasma processing chamber

US Patent 10804081 · Granted Oct 13, 2020

Estimated economic value: $92,724,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multi-plate electrostatic chucks with ceramic baseplates2025
Edge seal for lower electrode assembly2025
Edge seal for lower electrode assembly2025
Edge seal for lower electrode assembly2025
Substrate support with varying depths of areas between mesas and corresponding t2025
Networked games, rides and attractions2024
Electrostatic chuck with ceramic monolithic body2024
Electrostatically clamped edge ring2024
Multi-plate electrostatic chucks with ceramic baseplates2023
Theme or amusement park attraction using high frame rate active shutter technolo2023
Edge seal for lower electrode assembly2023
Edge seal for lower electrode assembly2023