Method for forming epitaxial layer at low temperature

Assignee

• Eugene Technology Co.

Inventors

• Doo Yeol RYU (3 patents)
• Seung Woo Shin (59 patents)
• Cha-young Yoo (71 patents)
• Woo Duck JUNG (10 patents)
• Ho Min CHOI (6 patents)
• Wan Suk Oh (7 patents)
• Hui Sik Kim (1 patents)
• Eun Ho Kim (29 patents)
• Seong Jin Park (70 patents)

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