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Home › Micromechanical component, micromirror-based laser system, and method for monitoring a micromirror-based laser system comprising dual sensor diodes for sensing temperature and light intensity

Micromechanical component, micromirror-based laser system, and method for monitoring a micromirror-based laser system comprising dual sensor diodes for sensing temperature and light intensity

US Patent 10795148 · Granted Oct 6, 2020

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