Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Determining moving properties of a target in an extreme ultraviolet light source

Determining moving properties of a target in an extreme ultraviolet light source

US Patent 10794683 · Granted Oct 6, 2020

Estimated economic value: $34,652,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Metrology system for measuring edge of circular workpiece2025
System and method for calibrating variable focal length lens system using calibr2021
High-speed tag lens assisted 3D metrology and extended depth-of-field imaging2020
Determining moving properties of a target in an extreme ultraviolet light source2020
Determining moving properties of a target in an extreme ultraviolet light source2020
Determining moving properties of a target in an extreme ultraviolet light source2020
Determining moving properties of a target in an extreme ultraviolet light source2019
Determining moving properties of a target in an extreme ultraviolet light source2019
Determining moving properties of a target in an extreme ultraviolet light source2019
Method of improving measurement of energy of extreme ultraviolet radiation gener2019
Metrology system for an extreme ultraviolet light source2018
Determining moving properties of a target in an extreme ultraviolet light source2017