Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Process for manufacturing a MEMS micromirror device, and associated device

Process for manufacturing a MEMS micromirror device, and associated device

US Patent 10768408 · Granted Sep 8, 2020

Estimated economic value: $12,164,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Biaxial microelectromechanical mirror device with piezoelectric actuation2025
Microelectromechanical mirror device with piezoelectric actuation having improve2025
Method for manufacturing a capacitive pressure sensor and capacitive pressure se2025
Method for manufacturing a capacitive pressure sensor and capacitive pressure se2025
Integrated thermal sensor and manufacturing process thereof2025
Packaged pressure sensor device and corresponding method for detecting the prese2025
Linear capacitive pressure sensor2025
Linear capacitive pressure sensor2025
Method for determining calibrated values of atmospheric pressure and related ele2025
Microelectromechanical mirror device with compensation of planarity errors2025
Microelectromechanical mirror device with piezoelectric actuation and improved o2025
Microelectromechanical mirror device with piezoelectric actuation and piezoresis2025