Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Micropump with electrostatic actuation

Micropump with electrostatic actuation

US Patent 10767641 · Granted Sep 8, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

PMUT array with presence of separate sensing small PZT on membranes edge2025
Transducer assembly with buried cavities and method of manufacturing the same2025
Piezoelectric micromachined ultrasonic transducer comprising a lobed membrane el2025
Piezoelectric micromachined ultrasonic transducer having a polymeric member over2025
Piezoelectric actuator provided with a deformable structure having improved mech2024
Process for manufacturing microelectromechanical devices, in particular electroa2024
Read/write device for a hard-disk memory system, and corresponding manufacturing2023
Piezoelectric actuator having a deformation sensor and fabrication method thereo2023
Method for manufacturing a fluid-ejection device with improved resonance frequen2022
Read/write device for a hard-disk memory system, and corresponding manufacturing2022
Piezoelectric MEMS device having a suspended diaphragm and manufacturing process2022
Process for manufacturing microelectromechanical devices, in particular electroa2022