Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Rotated boundaries of stops and targets

Rotated boundaries of stops and targets

US Patent 10761022 · Granted Sep 1, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Network monitor with a homodyne detector for early identification of network att2024
Fab management with dynamic sampling plans, optimized wafer measurement paths an2023
Misregistration metrology by using fringe Moiré and optical Moiré effects2021
Metrology targets and methods with oblique periodic structures2021
Quick adjustment of metrology measurement parameters according to process variat2020
Symmetric target design in scatterometry overlay metrology2020
Utilizing overlay misregistration error estimations in imaging overlay metrology2020
Fault discrimination and calibration of scatterometry overlay targets2020
Fault discrimination and calibration of scatterometry overlay targets2020
Identifying process variations during product manufacture2019
Scatterometry overlay based on reflection peak locations2019
Scatterometry system and method for generating non-overlapping and non-truncated2019