Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS sensor with dual pendulous proof masses

MEMS sensor with dual pendulous proof masses

US Patent 10759656 · Granted Sep 1, 2020

Estimated economic value: $178,515,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System for freeing stuck accelerometers2022
Continuous calibration of accelerometer sensitivity by proof-mass dithering2022
Gyroscope sensitivity calibration2020
Quadrature ADC feedback compensation for capacitive-based MEMS gyroscope2020
Multi-stage MEMS accelerometer for mixed g-level operation2020
Duty-cycled phase shifter for angular rate sensor2020
Method and device of MEMS process control monitoring and packaged MEMS with diff2019
MEMS device with reduced dynamic stress and methods2019
Method to test the quality factor of a MEMS gyroscope at chip probe2019
MEMS structure with improved shielding and method2018
MEMS structure with improved shielding and method2018
Drive signal control for resonating elements2017