Assignee
- Semiconductor Manufacturing International (Beijing)
- Semiconductor Manufacturing International (Shanghai)
Inventors
- Yan Geng (9 patents)
- Jie Chen (17 patents)
- Xiao Yuan Ma (4 patents)
- Kai Zhu (84 patents)
- Yan Ling (26 patents)
US Patent 10749511 · Granted Aug 18, 2020