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Home › Molybdenum silylcyclopentadienyl and silylallyl complexes and use thereof in thin film deposition

Molybdenum silylcyclopentadienyl and silylallyl complexes and use thereof in thin film deposition

US Patent 10745430 · Granted Aug 18, 2020

Estimated economic value: $154,425,000 ⓘ

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