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Home › Crosslinkable elastomer composition, molded article, seal member, plasma treatment apparatus and semiconductor manufacturing apparatus including said seal member, and agent for decreasing hardness of molded article, method for producing molded article

Crosslinkable elastomer composition, molded article, seal member, plasma treatment apparatus and semiconductor manufacturing apparatus including said seal member, and agent for decreasing hardness of molded article, method for producing molded article

US Patent 10723872 · Granted Jul 28, 2020

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