Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optical device and associated system

Optical device and associated system

US Patent 10712667 · Granted Jul 14, 2020

Estimated economic value: $19,688,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Wavelength tracking system, method to calibrate a wavelength tracking system, li2025
Imprint apparatus with movable stages2024
Metrology apparatus2024
Pulsed charged-particle beam system2024
Lithographic apparatus2024
Interferometer system, method of determining a mode hop of a laser source of an 2023
Lithographic apparatus2023
Method and apparatus for angular-resolved spectroscopic lithography characteriza2022
Interferometric stage positioning apparatus2022
Cyclic error measurements and calibration procedures in interferometers2022
Metrology apparatus2022
Lithographic apparatus2021