Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Jun Wang (207 patents)
- Gang Wang (319 patents)
- Mi Tang (7 patents)
- Xian Yong Pu (2 patents)
- Chengyu Zhu (1 patents)
US Patent 10712380 · Granted Jul 14, 2020