Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › MEMS rotation rate sensor including combined driving and detection

MEMS rotation rate sensor including combined driving and detection

US Patent 10704909 · Granted Jul 7, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for operating a photodiode and device for carrying out the method2025
Lidar system2024
Micromechanical rate-of-rotation sensor set-up, rate-of-rotation sensor array an2024
Scanning system and transmitting and receiving device for a scanning system2023
LIDAR system including convection cooling2022
Stabilized LiDAR system and method for stabilization2022
Rotation-rate sensor, method for producing a rotation-rate sensor2022
Yaw-rate sensor with a substrate having a main extension plane, method for manuf2022
Three-axis micromechanical rotation rate sensor system including linearly and ro2022
One-axis and two-axis rotation rate sensor2021
Sensor system for attaching a sensor set-up to a vehicle2021
Micromechanical rotational rate sensor system and corresponding production metho2021