High-tech temperature control device for semiconductor manufacturing facility

Assignee

• Global Standard Technology Co.

Inventors

• Jong-bae Kim (61 patents)
• Seung-Jin Yang (32 patents)
• Jae Suk Heo (1 patents)
• Chi-Won Choi (6 patents)
• Je Min Kim (4 patents)
• Hyeung Kwan Kim (1 patents)
• Yong Ho Choi (17 patents)

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