Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Josh Chiachi Yang (4 patents)
- Zhi Bing Deng (5 patents)
- Cheng-Tai Huang (16 patents)
- Cheng-Yi Huang (75 patents)
- Wen Jun Weng (3 patents)
- Jun Tao Guo (3 patents)