Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate pedestal module including backside gas delivery tube and method of making

Substrate pedestal module including backside gas delivery tube and method of making

US Patent 10655225 · Granted May 19, 2020

Estimated economic value: $40,560,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate pedestal including backside gas-delivery tube2025
Substrate pedestal including backside gas-delivery tube2025
Electrostatic chuck for use in semiconductor processing2025
Spatially tunable deposition to compensate within wafer differential bow2025
Friction stir welding in semiconductor manufacturing applications2025
Distance measurement between gas distribution device and substrate support at hi2024
Spatially tunable deposition to compensate within wafer differential bow2024
PECVD deposition system for deposition on selective side of the substrate2023
Electrostatic chuck for use in semiconductor processing2023
PECVD deposition system for deposition on selective side of the substrate2023
Substrate pedestal including backside gas-delivery tube2023
Substrate pedestal including backside gas-delivery tube2023