Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus for transportation of a substrate carrier in a vacuum chamber, system for vacuum processing of a substrate, and method for transportation of a substrate carrier in a vacuum chamber

Apparatus for transportation of a substrate carrier in a vacuum chamber, system for vacuum processing of a substrate, and method for transportation of a substrate carrier in a vacuum chamber

US Patent 10636687 · Granted Apr 28, 2020

Estimated economic value: $15,875,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods for team cooperation with real-time recording and transcript2025
Systems and methods for processing and presenting conversations2025
Systems and methods for live broadcasting of context-aware transcription and/or 2025
Systems and methods for automatic joining as a virtual meeting participant for t2025
Systems and methods for capturing, processing, and rendering one or more context2025
Evaporation apparatus, vapor deposition apparatus, and evaporation method2025
Systems and methods for automatically generating conversation outlines and annot2024
Systems and methods for team cooperation with real-time recording and transcript2024
Roller for transporting a flexible substrate, vacuum processing apparatus, and m2024
Systems and methods for processing and presenting conversations2024
Material deposition apparatus having at least one heating assembly and method fo2024
Systems and methods for capturing, processing, and rendering one or more context2024