Metal-assisted etch combined with regularizing etch

Assignee

• Advanced Silicon Group

Inventors

• Joanne Yim (7 patents)
• Jeffrey B. Miller (19 patents)
• Michael Jura (10 patents)
• Marcie R. Black (31 patents)
• Joanne Forziati (8 patents)
• Brian P. Murphy (13 patents)
• Lauren Magliozzi (2 patents)

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