Apparatus for evacuating a corrosive effluent gas stream from a processing chamber

Assignee

• Edwards Limited

Inventors

• Christopher Mark Bailey (18 patents)
• Clive Marcus Lloyd Tunna (6 patents)
• Jack Raymond Tattersall (3 patents)
• Ingo Stephen Graham (4 patents)
• Michael Roger Czerniak (7 patents)
• Gary Peter Knight (10 patents)
• Darren Mennie (5 patents)
• Duncan Michael Price (15 patents)
• Derek Martin Baker (5 patents)
• Andrew James Seeley (39 patents)

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