Assignee
- Semiconductor Manufacturing International (Shanghai)
- Semiconductor Manufacturing International (Beijing)
Inventors
- Yijun Chen (16 patents)
- Yu Hua (22 patents)
- Kuanchieh Yu (4 patents)
- Chao-Yi Wang (19 patents)
- Shan Zhang (6 patents)
US Patent 10587971 · Granted Mar 10, 2020