Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vacuum substrate storage

Vacuum substrate storage

US Patent 10586722 · Granted Mar 10, 2020

Estimated economic value: $21,926,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Magnetic resonance examination system with a user interface2020
Methods and systems for controlling a semiconductor fabrication process2019
Semiconductor manufacturing systems2018
Semiconductor wafer handling transport2018
Substrate loading and unloading station with buffer2017
Methods and systems for controlling a semiconductor fabrication process2015
Stacked process modules for a semiconductor handling system2015
Wafer center finding with kalman filter2015
Semiconductor manufacturing process module2014
Semiconductor manufacturing process modules2014
Methods and systems for controlling a semiconductor fabrication process2014
Semiconductor manufacturing process modules2014