Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of fabricating a MEMS and/or NEMS structure comprising at least two elements suspended from a support at different distances from said support

Method of fabricating a MEMS and/or NEMS structure comprising at least two elements suspended from a support at different distances from said support

US Patent 10585074 · Granted Mar 10, 2020

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Submersible environmental sensor incorporating anti-fouling means2025
Optomechanical sensor for sensing species' concentration in a liquid medium2025
Variable resonance frequency acoustic wave emission and/or detection device2025
Electromechanical conversion device and system using such a device2024
Method for regulating a resistive element intended for deicing and/or demisting 2024
Device and method for processing signals from a set of ultrasonic transducers2024
Method for manufacturing a plurality of resonators2023
Method for manufacturing a microelectronic device comprising a membrane suspende2022
Thermal flux sensor with heating nanofilaments2022
Thermal flux sensor with heating nanofilaments2022
Piezoelectric transducer2021
Field effect transistor with an atomically thin channel2021