Rotary feed-through for mounting a rotating substrate tube in a lathe, a CVD lathe and a corresponding method using the CVD lathe

Assignee

• Draka Comteq B.V.

Inventors

• Igor Milicevic (43 patents)
• Raoul Hens (2 patents)
• Johannes Antoon Hartsuiker (36 patents)
• Gertjan Krabshuis (20 patents)
• Mattheus Jacobus Nicolaas Van Stralen (52 patents)

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