Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of reducing effects of reticle heating and/or cooling in a lithographic process

Method of reducing effects of reticle heating and/or cooling in a lithographic process

US Patent 10564555 · Granted Feb 18, 2020

Estimated economic value: $54,374,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of reducing effects of lens heating and/or cooling in a lithographic proc2023
Lithographic method and apparatus2021
Lithographic method and apparatus2019
Method of reducing effects of reticle heating and/or cooling in a lithographic p2019
Method of reducing effects of reticle heating and/or cooling in a lithographic p2019